Found 12403 publications.
News Coverage
2006
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"Shock-wave generation in transparent media from ultra-fast lasers.".
SPIE Defense and Security Symposium. Orlando, FL, USA, May 2006.
2006
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"Spectral narrowing of solid state lasers by narrow-band PTR Bragg mirrors.".
SPIE Laser Source and System Technology for Defense and Security II; SPIE Defense & Security Symposium (Orlando, FL, USA) May 2006
2006
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"Tin Material Consumption and the Mirror Lifetime for Droplet Laser Plasma Sources".
5th International Symposium on EUV Lithography (Barcelona, Spain)
2005
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"Ablation and structural modification of polymers with femtosecond lasers".
6th International Symposium on Laser Precision Microfabrication 2005 (Williamsburg, VA, USA) April
2005
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"Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources".
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA, 2005) volume 5751-64, 1-3 March
2005
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"EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas".
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA) volume 5751-92, 1-3 March 2005
2005
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"High conversion efficiency microscopic tin-doped droplet laser plasma source for EUVL".
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA) volume 5751-30, 1-3 March 2005
2005
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"Radiation transport modeling for Xe and Sn-doped droplet laser-plasma sources".
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA, 2005) volume 5751-90, 1-4 March
2004
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"Debris studies for the tin-based droplet laser-plasma EUV source".
ISMT EUV Source Workshop (Santa Clara, CA) 21 February
2004
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"Debris studies for the tin-based droplet laser-plasma EUV source".
SPIE Microlithography Symposium (Santa Clara, CA) 22-27 February 2004
2004
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"Diagnostics of laser plasma EUV sources for Lithography".
Proceedings of the 25th International Congress on High Speed Photography, SPIE (Alexandria, VA, USA, 2004) 22-24 September 2004
2004
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"EUV spectroscopy of mass-limited Sn-doped laser plasmas".
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
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"Femtosecond direct writing of waveguides in non-oxide glasses".
Photonics West LASE (San Jose, CA) 25-31 January 2004
2004
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"Femtosecond laser ablation studies of dental ceramics, teeth, and other related materials.".
International Symposium on Non-Oxide Glasses and New Optical Glasses (ISNOG) (Cocoa Beach, FL, USA) 7-12 November 2004
2004
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"In-band high-resolution imaging of microscopic 13 laser-plasma sources.".
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
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"Ion emission characterization from microscopic laser-plasma tin-doped droplet sources".
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
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"Laser fabricated waveguides in various materials".
Conference on Lasers and Electro-Optics (CLEO) (San Francisco, CA), 17 May 2004
2004
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"Model calculations of plasma expansion and EUV emission from Xe and Sn laser plasmas".
EUV Source Workshop (Santa Clara, CA) 21 February
2004
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"Modeling laser-plasma sources for EUV".
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004
2004
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"Particulate debris characterization and mitigation from microscopic laser-plasma tin-doped droplet sources".
International Symposium on EUV Lithography (Miyazaki, Japan) 1-5 November 2004