Found 12405 publications.
Patents
2003
.
"Direct fabrication of waveguiding structures with a femtosecond laser".
International Congress on Applications of Lasers & Electro-Optics (ICALEO) (Jacksonville, FL) 14 October
2003
.
"EUV Sources – the case for tin".
SEMATECH Workshop on Sources for EUV Lithography (Santa Clara, CA) 22 February
2003
.
"Femtosecond ablation scaling for different materials".
International Congress on Applications of Lasers & Electro-Optics (ICALEO) (Jacksonville, FL) 14 October
2003
.
"Femtosecond direct writing of waveguides in optical materials".
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
.
"Femtosecond direct-write waveguide fabrication in optical materials".
International Conference on Laser Processing of Materials (Munich, Germany) June
2003
.
"High conversion efficiency mass-limited laser plasma source for EUV lithography".
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
.
"High conversion efficiency mass-limited Sn-based laser plasma source for EUV lithography".
International Conference for El. Ion & Photon Beam Technology and Nanofabrication, American Vacuum Society (Tampa, FL) 27-29 May
2003
.
"High conversion efficiency Tin material laser plasma source for EUVL".
SPIE Microlithography Symposium (Santa Clara, CA) 23-28 February
2003
.
"High power, tunable, MHz burst-mode Q-switched Alexandrite laser system".
Conference on Lasers and Electro-Optics (CLEO) (Baltimore, MD) June
2003
.
"High-efficiency tin-based EUV sources".
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, SPIE (San Diego, CA) volume 5196, number 14, August
2003
.
"High-power laser-produced-plasma radiation source for nanolithography".
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, SPIE (San Diego, CA) volume 5196, number 10, August
2003
.
"Materials ablation with ultra-short laser pulses".
Directed Energy Professional Society, Directed Energy Professional Society (Boulder, CO, USA) October
2003
.
"Properties of Laser-Plasmas and possible Non-lethal Technology applications".
NTAR-V Conference (Crystal City) 3-6 November 2003
2003
.
"Radiation code calculations of tin plasma EUV emission".
International Symposium on EUV Lithography30 September-3 October
2003
.
"Repeller Field debris mitigation for mass-limited, tin-doped laser-plasma EUV sources".
International Symposium on EUV Lithography (Antwerp, Belgium) 30 September-3 October
2003
.
"Rigorous coupled wave analysis of grating coupled surface-emitting guided-wave devices".
OSA Topical meeting Integrated Optics Research (IPR) Topical Meeting (OSA), Washington D.C.
2003
.
"Temperature dependant changes in YCOB crystals".
American Chemical Society National Meeting and Exposition (New Orleans, LA) 23-27 March
2003
.
"The case for tin as an EUV source".
EUV Source Workshop (Antwerp, Belgium) 29 September
2003
.
"The repeller field debris mitigation approach for EUV sources".
SPIE Microlithography Symposium (Santa Clara, CA) 23-28 February
2003
.
"Universal wave front reconstruction algorithm for slope data ".
Frontiers in Optics 2003/87th OSA annual meeting, Tucson, October, 2003.