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Facilities

Growth

Nitride MBE system
Sources
  • Nitrogen plasma source
  • Al — 40 CC cold lip effusion cell
  • Ga — 40 CC dual filament effusion cell
  • In — 40 CC hot lip cell
  • Be — 16 CC dopant cell
  • Mg — 16 CC dopant cell
  • Si — 16 CC high temperature cell
  • Sc — 10 CC high temperature effusion cell
Additional details
  • 2x CT8 cryo pumps
  • Custom photo enhanced growth
  • STAIB RHEED gun
  • 3” substrate manipulator with platens
  • In-Situ 4000 Accutemp Process Monitor for III/Nitrides
 
Hybrid MBE system
  • Ga — Veeco 400g SUMO MK 2
  • In — Veeco 400g SUMO MK 2
  • Al — 1x Veeco 200g Cold-lipped SUMO cell for Al
  • Si SUSI/BE — MBE Komponenten Dual Dopant (Si SUSI/Be)
  • As — EPI/Veeco Mark 4 arsenic valved cracker 
Additional details
  • 400 L/s Varian ion pump + Gamma Vacuum pump controller
  • CTI 8 Cryo pump + water cooled compressor
  • Varian RED (RHEED) Electron gun and controller
  • Pyro port heated viewport
  • Modern Veeco rotation/flip axis motors and controllers
  • 3” substrate manipulator (modern uniblock design)
  • Standard Buffer/prep chamber with heater station and transfer arms
  • Varian 200 L/S ion pump with Phi (early gamma-style) pump controller
  • SRS IGC gauge controllers for GC, BFM gauges
  • Grandville Phillips gauge controllers for LC, BC
  • Modern Veeco substrate manipulator controller/motors
  • EPI DC power supplies
  • MBE Control/Riber Eurotherm boxes with 2400 series eurotherms
  • Custom interlock box with integrated Al interlock
  • SRS 200 Residual Gas Analyzer
  • Neslab HX300 10 kW chiller
 
 

Bakeout Chamber

  • Modified Riber Modutrack and Veeco phosphorous recovery system for UHV bakeouts

Packaging

  • K&S 4524A Digital Series Manual Wire Bonder
  • Tresky — T-3000-FC2-XP Flip Chip Bonder

Characterization

UV Lab

UV optical Characterization (PL, EL, LI, etc.)

  • CryLas — FQSS 213-50 213 nm, 50 uJ,  5th harmonic pulsed laser source
  • Oriel Instruments/Newport — MS257 Monochromator
  • Oriel Instruments/Newport  — Instaspec VIII 78723 back illuminated CCD
  • Oriel Instruments/Newport — flange mountable Si and InGaAs detectors
  • RMC — “cryogen free” closed cycle cryostat (10 K) w/custom mount for full 2″ wafers
  • LakeShore — 336 Temperature controller
  • Stanford Research Systems — SR830 lock in amplifier
  • Optronic Laboratories — 620-NVS CCD imaging telescope
  • Optronic Laboratories — 65A programmable current source
  • Optronic Laboratories — Integrating sphere calibration standard
  • Optronic Laboratories — 18-inch diameter integrating sphere
  • Ilx Lightwave — LDX-3690 High power Laser Diode Current Source
  • Ilx Lightwave — LDX-3670 High power Laser Diode Current Source
  • Photon systems — 224.3 nm HeAg laser 

UV Photoresponse

  • Oriel Instruments/Newport — CS260 Monochromator w/ integrated deuterium light source
  • Custom probe stage with Navitar digital microscope w/zoom and Signatone S-725 Micropostioners 
  • Stanford Research Systems — SR570 low noise current amplifier
 
 

Electronic Characterization

  • Agilent/Keysight — N8973A 3 Ghz Noise Figure Analyzer
  • Radiant Technologies — Precision Multiferroic II 100V Ferroelectric test system
  • Keithley — 2400 source meter
  • Keithley — 2750 w/7702 cards digital multimeter and multiplexer
  • MMR Technologies — variable temperature Hall measurement system (77 K to 730 K in process gas)
  • NanoMetrics ECV Pro — Electrochemical Capacitance Voltage Profile

IR Lab

IR optical Characterization (PL, EL, LI, tranmission, reflection, absorption, etc.)

  • Thermo Fisher — iS50 with step scan
  • Pike Technologies — VeeMAX II Variable Angle Specular Reflectance Accessory
  • Custom mid-IR photoluminescence measurement setup for luminescence from 1 to 18 µm
  • Cryo industries  — variable temperature liquid nitrogen cryostat with custom 121x pin grid array cold head (77 K)
  • Janis Research Systems — variable temperature liquid nitrogen cryostat
  • Stanford Research Systems — SR810 lock in amplifier
  • Keithley — 2602 SYSTEM Source Meter
  • Custom probe stage with zoom digital microscope, Signatone S-725  Micropostioners, and Arroyo Instruments  274 TECMount
  • Infrared Associates — MCT detector 13 µm cutoff (primarily used for LI measurements)
  • HP/Agilent — 8114A 100 Volt 2 Amp Pulse Generator
 
 
IR Photoresponse
  • Stanford Research Systems — SR570 low noise current amplifier
  • Cryo industries — variable temperature liquid nitrogen “optical detector” cryostat with custom 121x pin grid array cold head (77 K)
  • Calibrated black body responsivity setup coming soon

Misc.

  • Bambu Labs 3D Printer